TY - JOUR
T1 - Zinc oxide, a multifunctional material: from material to device applications
AU - Fortunato, Elvira Maria Correia
AU - Gonçalves, Alexandra
AU - Pimentel, Ana Cláudia Madeira Botas Gomes
AU - Barquinha, Pedro Miguel Cândido
AU - Gonçalves, Gonçalo
AU - Pereira, Luis Miguel Nunes
AU - Ferreira, Isabel Maria Mercês
AU - Martins, Rodrigo Ferrão de Paiva
PY - 2009/7
Y1 - 2009/7
N2 - In this paper we report on some of the recent advances in transparent thin film oxide semiconductors, specifically zinc oxide produced by radio frequency magnetron sputtering at room temperature, with multifunctional properties. By controlling the deposition parameters it is possible to produce undoped material with electronic semiconductor properties, or by doping it to get either n-type or p-type semiconductor behavior. In this work we refer to our experience in producing n-type doped zinc oxide as transparent electrode to be used in optoelectronic applications such as solar cells and position sensitive detectors, while the undoped zinc oxide can be used as active layer of fully transparent thin film transistors.
AB - In this paper we report on some of the recent advances in transparent thin film oxide semiconductors, specifically zinc oxide produced by radio frequency magnetron sputtering at room temperature, with multifunctional properties. By controlling the deposition parameters it is possible to produce undoped material with electronic semiconductor properties, or by doping it to get either n-type or p-type semiconductor behavior. In this work we refer to our experience in producing n-type doped zinc oxide as transparent electrode to be used in optoelectronic applications such as solar cells and position sensitive detectors, while the undoped zinc oxide can be used as active layer of fully transparent thin film transistors.
U2 - 10.1007/s00339-009-5086-5
DO - 10.1007/s00339-009-5086-5
M3 - Article
SN - 0947-8396
VL - 96
SP - 197
EP - 205
JO - Applied Physics A: Materials Science & Processing
JF - Applied Physics A: Materials Science & Processing
IS - SI1
ER -