Zero-mode waveguide detection of DNA translocation through FIB-organised arrays of engineered nanopores

T. Auger, E. Bourhis, J. Donnez, A. Durnez, J. M. Di Meglio, L. Auvray, F. Montel, J. Yates, J. Gierak

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)90-94
JournalMicroelectronic Engineering
Volume187
DOIs
Publication statusPublished - 5 Feb 2018

Keywords

  • Focused ion beam
  • Zero-mode waveguide
  • Dielectric films
  • Biosensor
  • Silicon nitride
  • Silicon carbide

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