Wien-filtered Cs+ beam for SIMS: source description

Maria Isabel Simões Catarino; Orlando Manuel Neves Duarte Teodoro; Augusto Moutinho

doi:10.1016/0169-4332(93)90444-G

Wien-filtered Cs+ beam for SIMS: source description

Maria Isabel Simões Catarino, Orlando Manuel Neves Duarte Teodoro, Augusto Moutinho

DF – Departamento de Física

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A compact cesium ion source with a Wien filter is described. This source has been developed in order to produce a pure beam of cesium ions for positive SIMS analysis. The ions are produced by a surface ionization ion emitter. The initial beam is about 99% pure and the remaining 1% is removed via the Wien filter. An asymmetric einzel lens at the end provides the focusing of the beam on the target. A short description of the source is presented as well as the measured final beam characteristics.

Original language	English
Pages (from-to)	291-294
Journal	Applied Surface Science
Volume	70-1
Issue number	Part 1
DOIs	https://doi.org/10.1016/0169-4332(93)90444-G
Publication status	Published - 1993
Event	12th International Vacuum Congress and 8th International Conference on Solid Surfaces (IVC 12/ICSS 8) - The Hague, Netherlands Duration: 12 Oct 1992 → 16 Oct 1992

Keywords

Cesium
Focusing
Ion beams
Ion sources
Ionization
Lenses
Surfaces
Wave filters

Access to Document

10.1016/0169-4332(93)90444-GLicence: CC BY-NC-ND

Cite this

@article{7588fc853ba44966a5690aa0ce4be04d,

title = "Wien-filtered Cs+ beam for SIMS: source description",

abstract = "A compact cesium ion source with a Wien filter is described. This source has been developed in order to produce a pure beam of cesium ions for positive SIMS analysis. The ions are produced by a surface ionization ion emitter. The initial beam is about 99% pure and the remaining 1% is removed via the Wien filter. An asymmetric einzel lens at the end provides the focusing of the beam on the target. A short description of the source is presented as well as the measured final beam characteristics.",

keywords = "Cesium , Focusing , Ion beams , Ion sources , Ionization , Lenses , Surfaces , Wave filters",

author = "Catarino, {Maria Isabel Sim{\~o}es} and Teodoro, {Orlando Manuel Neves Duarte} and Augusto Moutinho",

note = "Sem PDF.; 12th International Vacuum Congress and 8th International Conference on Solid Surfaces (IVC 12/ICSS 8), IVC 12/ICSS 8 ; Conference date: 12-10-1992 Through 16-10-1992",

year = "1993",

doi = "10.1016/0169-4332(93)90444-G",

language = "English",

volume = "70-1",

pages = "291--294",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "North-Holland | Elsevier",

number = "Part 1",

}

TY - JOUR

T1 - Wien-filtered Cs+ beam for SIMS

T2 - 12th International Vacuum Congress and 8th International Conference on Solid Surfaces (IVC 12/ICSS 8)

AU - Catarino, Maria Isabel Simões

AU - Teodoro, Orlando Manuel Neves Duarte

AU - Moutinho, Augusto

N1 - Sem PDF.

PY - 1993

Y1 - 1993

N2 - A compact cesium ion source with a Wien filter is described. This source has been developed in order to produce a pure beam of cesium ions for positive SIMS analysis. The ions are produced by a surface ionization ion emitter. The initial beam is about 99% pure and the remaining 1% is removed via the Wien filter. An asymmetric einzel lens at the end provides the focusing of the beam on the target. A short description of the source is presented as well as the measured final beam characteristics.

AB - A compact cesium ion source with a Wien filter is described. This source has been developed in order to produce a pure beam of cesium ions for positive SIMS analysis. The ions are produced by a surface ionization ion emitter. The initial beam is about 99% pure and the remaining 1% is removed via the Wien filter. An asymmetric einzel lens at the end provides the focusing of the beam on the target. A short description of the source is presented as well as the measured final beam characteristics.

KW - Cesium

KW - Focusing

KW - Ion beams

KW - Ion sources

KW - Ionization

KW - Lenses

KW - Surfaces

KW - Wave filters

U2 - 10.1016/0169-4332(93)90444-G

DO - 10.1016/0169-4332(93)90444-G

M3 - Article

SN - 0169-4332

VL - 70-1

SP - 291

EP - 294

JO - Applied Surface Science

JF - Applied Surface Science

IS - Part 1

Y2 - 12 October 1992 through 16 October 1992

ER -

Wien-filtered Cs+ beam for SIMS: source description

Abstract

Keywords

Access to Document

Fingerprint

Cite this