Abstract
Microcrystalline hydrogenated silicon based p-i-n photodiodes with an increased bias controlled IR sensitivity (above 800 nm) have been deposited successfully by a new cyclic chemical vapour deposition method. Details of preparation conditions, material characterization (structural, transport and optoelectronic properties), and device behaviour (response time, current-voltage and spectral photoresponse measurements) are reported. The results show that the microcrystalline device, compared with an amorphous device, presents a higher photocurrent with an increased collection efficiency in the red and near-IR due to an enhanced absorption.
Original language | English |
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Pages (from-to) | 164-167 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 296 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1 Jan 1997 |
Keywords
- Hydrogenated silicon
- Photodiodes
- Spectral response