This paper presents results of the role of the oxygen partial pressure (pO2) used on the properties exhibited by doped μc silicon oxycarbide films produced by a Two Consecutive Decomposition and Deposition Chamber (TCDDC) system , where a spatial separation between the plasma and the growth regions is achieved. The films produced are highly conductive and transparent with suitable properties for optoelectronic applications.
|Number of pages||4|
|Journal||Proceedings Of The Ieee|
|Publication status||Published - 1994|
|Event||1994 IEEE 1st World Conference on Photovoltaic Energy Conversion/24th IEEE Photovoltaic Specialists Conference - Waikoloa, United States|
Duration: 5 Dec 1994 → 9 Dec 1994