Towards environmental friendly solution-based ZTO/AlOx TFTs

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Solution based deposition has been recently considered as a viable option for low-cost flexible electronics. In this context research efforts have been increasingly centred on the development of suitable solution-processed materials for oxide based transistors. Nevertheless, the majority of synthetic routes reported require the use of toxic organic solvents. In this work we report on a new environmental friendly solution combustion synthesis route, using ethanol as solvent, for the preparation of indium/gallium free amorphous zinc-tin oxide (ZTO) thin film transistors (TFTs) including AlOx gate dielectric. The decomposition of ZTO and AlOx precursor solutions, electrical characterization and stability of solution processed ZTO/AlOx TFTs under gate-bias stress, in both air and vacuum atmosphere, were investigated. The devices demonstrated low hysteresis (ΔV=0.23 V), close to zero turn on voltage, low threshold voltage (VT=0.36 V) and a saturation mobility of 0.8 cm2 V-1 s-1 at low operation voltages. Ethanol based ZTO/AlOx TFTs are a promising alternative for applications in disposable, low cost and environmental friendly electronics.

Original languageEnglish
Article number024007
JournalSemiconductor Science And Technology
Issue number2(SI)
Publication statusPublished - 1 Feb 2015


  • aluminum oxide
  • combustion reaction
  • ethanol solution synthesis
  • solution TFTs
  • ZTO


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