Thin film position sensitive detectors: from 1D to 3D applications: The Technology and Applications of Amorphous Silicon

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter is a review of ID, 2D and 3D thin film position sensitive detectors (TFPSD) made with hydrogenated amorphous silicon. Examples of different types of TFPSD are given, including the technological implications of the fabrication process and the physics ruling their behaviors. A detailed numerical analysis and electro-optical characterization is made for large area thin film position sensitive detectors and linear array devices, including the peripherals to be used in measurement/inspection systems.
Original languageEnglish
Title of host publicationThin film position sensitive detectors: from 1D to 3D applications
Subtitle of host publicationThe Technology and Applications of Amorphous Silicon
EditorsRobert Street
PublisherSpringer Intrnational
Pages342-403
Number of pages62
Volume37
Edition1st edition
ISBN (Electronic)978-3-662-04141-3
ISBN (Print)978-3-642-08499-7
DOIs
Publication statusPublished - 14 Apr 2000

Keywords

  • Reverse Bias
  • Plasma Enhance Chemical Vapor Deposition
  • Light Spot
  • Resistive Layer
  • Equivalent Electric Circuit

Fingerprint Dive into the research topics of 'Thin film position sensitive detectors: from 1D to 3D applications: The Technology and Applications of Amorphous Silicon'. Together they form a unique fingerprint.

Cite this