Thin film position sensitive detectors based on pin amorphous silicon carbide structures

Engineering & Materials Science

• Amorphous silicon 100%
• Color 26%
• Detectors 57%
• Glass 29%
• Indium 47%
• Oxide films 45%
• Oxides 31%
• Plasma enhanced chemical vapor deposition 51%
• Silicon carbide 78%
• Substrates 25%
• Thin films 69%
• Tin oxides 50%

Chemistry

• Amorphous Silicon 99%
• Application 11%
• Conductivity 24%
• Density of State 39%
• Deposition Technique 39%
• Glass Substrate 36%
• ITP 54%
• Liquid Film 17%
• Oxide 19%
• Plasma Enhanced Chemical Vapour Deposition 44%
• Silicon Carbide 81%

Physics & Astronomy

• amorphous silicon 67%
• color 17%
• conductivity 16%
• detectors 40%
• glass 14%
• indium oxides 24%
• oxide films 21%
• oxides 15%
• performance 21%
• silicon carbides 70%
• thin films 37%
• tin oxides 23%
• vapor deposition 18%