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The Role of the species formed in PECVD systems on the density of states of a-Si: H films
Rodrigo Ferrão de Paiva Martins, L Rodrigues, Maria Manuela de Almeida Carvalho Vieira, Elvira Maria Correia Fortunato, Micael Moreira Santos, E. A T Dirani, N. Carvalho, I. Baia
Research output: Contribution to journal › Article › peer-review