The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

Li Jian Meng, Jing Song Gao, Manuel Pereira dos Santos, Xiaoyi Wang, Tong Tong Wang

Research output: Contribution to journalConference article

32 Citations (Scopus)

Abstract

Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region that is useful for some electromagnetic wave shielding applications. © 2007 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)1365-1369
Number of pages5
JournalThin Solid Films
Volume516
Issue number7
DOIs
Publication statusPublished - 15 Feb 2008
EventSymposium on Advances in Transparents Electronics held at the European Materials Research Society Meeting - Nice, France
Duration: 29 May 20061 Jun 2006

Keywords

  • Polycarbonate
  • Thin film
  • Ion beam assisted deposition
  • ITO

Fingerprint Dive into the research topics of 'The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition'. Together they form a unique fingerprint.

Cite this