Structure and composition of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This work presents experimental data concerning the role of the oxygen partial pressure used during the preparation process, on the structure, composition and optoelectronic properties of wide band gap doped microcrystalline silicon oxycarbide films produced by a TCDDC system [1].

Original languageEnglish
Pages (from-to)787-792
Number of pages6
JournalMRS Proceedings
Volume358
Publication statusPublished - 1995

Fingerprint Dive into the research topics of 'Structure and composition of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques'. Together they form a unique fingerprint.

  • Cite this