Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 degrees C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In(2)O(3) with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to >= 1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of similar to 90 cm(2)/Vs, resistivity of similar to 6.8 x 10(-4) Omega cm and carrier concentration of similar to 1.01 x 10(20)cm(-3) with >similar to 73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.
|Journal||Physica Status Solidi A-Applications And Materials Science|
|Publication status||Published - 1 Jan 2010|