Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis

Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins

doi:10.1002/pssa.200983745

Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis

Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 degrees C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In(2)O(3) with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to >= 1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of similar to 90 cm(2)/Vs, resistivity of similar to 6.8 x 10(-4) Omega cm and carrier concentration of similar to 1.01 x 10(20)cm(-3) with >similar to 73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.

Original language	Unknown
Pages (from-to)	1554-1557
Journal	Physica Status Solidi A-Applications And Materials Science
Volume	207
Issue number	7
DOIs	https://doi.org/10.1002/pssa.200983745
Publication status	Published - 1 Jan 2010

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10.1002/pssa.200983745

Cite this

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title = "Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis",

abstract = "Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 degrees C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In(2)O(3) with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to >= 1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of similar to 90 cm(2)/Vs, resistivity of similar to 6.8 x 10(-4) Omega cm and carrier concentration of similar to 1.01 x 10(20)cm(-3) with >similar to 73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.",

keywords = "doping, structure, spray pyrolysis, In(2)O(3), electrical properties, optical properties",

author = "Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2010",

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doi = "10.1002/pssa.200983745",

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volume = "207",

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TY - JOUR

T1 - Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2010/1/1

Y1 - 2010/1/1

N2 - Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 degrees C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In(2)O(3) with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to >= 1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of similar to 90 cm(2)/Vs, resistivity of similar to 6.8 x 10(-4) Omega cm and carrier concentration of similar to 1.01 x 10(20)cm(-3) with >similar to 73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.

AB - Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 degrees C by spray pyrolysis technique. The Mo doping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In(2)O(3) with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to >= 1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of similar to 90 cm(2)/Vs, resistivity of similar to 6.8 x 10(-4) Omega cm and carrier concentration of similar to 1.01 x 10(20)cm(-3) with >similar to 73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.

KW - doping

KW - structure

KW - spray pyrolysis

KW - In(2)O(3)

KW - electrical properties

KW - optical properties

U2 - 10.1002/pssa.200983745

DO - 10.1002/pssa.200983745

M3 - Article

SN - 0031-8965

VL - 207

SP - 1554

EP - 1557

JO - Physica Status Solidi A-Applications And Materials Science

JF - Physica Status Solidi A-Applications And Materials Science

IS - 7

ER -