Structural characterisation of zinc oxide thin films produced by spray pyrolysis

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Abstract

In this work, we present a study of the effect of temperature, type and concentration of the dopant on the structural characteristics of ZnO thin films produced by spray pyrolysis; the crystallite size has been determined from profile peak shape analysis. These results are compared to the electrical characterisation performed on these materials. The effect of the dopant on the properties of ZnO thin films depends on its characteristics, mainly its ionic radius. Al, Ga and In have been studied as dopants, the best one being In, since it leads to the lowest resistivity.
Original languageEnglish
Title of host publicationKey Engineering Materials
Pages599-602
Number of pages4
Volume230-232
DOIs
Publication statusPublished - 1 Jan 2002
Event1st International Materials Symposium (Materials 2001) - Universidade de Coimbra, Coimbra, Portugal
Duration: 9 Apr 200111 Apr 2001

Conference

Conference1st International Materials Symposium (Materials 2001)
Country/TerritoryPortugal
CityCoimbra
Period9/04/0111/04/01

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