In this work, we present a study of the effect of temperature, type and concentration of the dopant on the structural characteristics of ZnO thin films produced by spray pyrolysis; the crystallite size has been determined from profile peak shape analysis. These results are compared to the electrical characterisation performed on these materials. The effect of the dopant on the properties of ZnO thin films depends on its characteristics, mainly its ionic radius. Al, Ga and In have been studied as dopants, the best one being In, since it leads to the lowest resistivity.
|Title of host publication||Key Engineering Materials|
|Number of pages||4|
|Publication status||Published - 1 Jan 2002|
|Event||1st International Materials Symposium (Materials 2001) - Universidade de Coimbra, Coimbra, Portugal|
Duration: 9 Apr 2001 → 11 Apr 2001
|Conference||1st International Materials Symposium (Materials 2001)|
|Period||9/04/01 → 11/04/01|