TY - JOUR
T1 - Stopping power of C, O and Cl in tantalum oxide
AU - Barradas, Nuno P.
AU - Alves, E.
AU - Fonseca, M.
AU - Siketić, Z.
AU - Bogdanović Radović, I.
N1 - This work was also partially supported by FCT – Fundação para a Ciência e Tecnologia, under Grant PTDC/FIS/100448/2008.
PY - 2014/8/1
Y1 - 2014/8/1
N2 - Tantalum oxide is used in a variety of applications due to its high bandgap, high-K and high index of refraction. Unintentional impurities can change properties of tantalum oxide, and heavy ion elastic recoil detection is a method that can play a fundamental role in the quantification of those impurities. Furthermore, tantalum oxide is frequently part of the samples that also include other materials, which are often analysed with ion beam techniques. However, there are very few reported stopping power measurements for tantalum oxide, and data analysis relies not only on interpolation from a sparse data base but also on the Bragg rule. As is well known, the Bragg rule is often inaccurate for oxides, particularly when the difference in atomic numbers of the involved elements is very large as is case for Ta2O5. We have used a bulk method, previously developed by us and applied successfully to other systems, to determine experimentally the stopping power of tantalum oxide for three different ion types: C, O and Cl. In the present paper the results of our measurements and bulk method analysis are presented.
AB - Tantalum oxide is used in a variety of applications due to its high bandgap, high-K and high index of refraction. Unintentional impurities can change properties of tantalum oxide, and heavy ion elastic recoil detection is a method that can play a fundamental role in the quantification of those impurities. Furthermore, tantalum oxide is frequently part of the samples that also include other materials, which are often analysed with ion beam techniques. However, there are very few reported stopping power measurements for tantalum oxide, and data analysis relies not only on interpolation from a sparse data base but also on the Bragg rule. As is well known, the Bragg rule is often inaccurate for oxides, particularly when the difference in atomic numbers of the involved elements is very large as is case for Ta2O5. We have used a bulk method, previously developed by us and applied successfully to other systems, to determine experimentally the stopping power of tantalum oxide for three different ion types: C, O and Cl. In the present paper the results of our measurements and bulk method analysis are presented.
KW - Heavy ions
KW - Ion beam analysis
KW - Stopping power
KW - Tantalum oxide
UR - http://www.scopus.com/inward/record.url?scp=84902533335&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2014.02.050
DO - 10.1016/j.nimb.2014.02.050
M3 - Conference article
AN - SCOPUS:84902533335
SN - 0168-583X
VL - 332
SP - 152
EP - 155
JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
T2 - 21st International Conference on Ion Beam Analysis (IBA)
Y2 - 23 June 2013 through 28 June 2013
ER -