Stopping power of C, O and Cl in tantalum oxide

Nuno P. Barradas, E. Alves, M. Fonseca, Z. Siketić, I. Bogdanović Radović

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

Tantalum oxide is used in a variety of applications due to its high bandgap, high-K and high index of refraction. Unintentional impurities can change properties of tantalum oxide, and heavy ion elastic recoil detection is a method that can play a fundamental role in the quantification of those impurities. Furthermore, tantalum oxide is frequently part of the samples that also include other materials, which are often analysed with ion beam techniques. However, there are very few reported stopping power measurements for tantalum oxide, and data analysis relies not only on interpolation from a sparse data base but also on the Bragg rule. As is well known, the Bragg rule is often inaccurate for oxides, particularly when the difference in atomic numbers of the involved elements is very large as is case for Ta2O5. We have used a bulk method, previously developed by us and applied successfully to other systems, to determine experimentally the stopping power of tantalum oxide for three different ion types: C, O and Cl. In the present paper the results of our measurements and bulk method analysis are presented.

Original languageEnglish
Pages (from-to)152-155
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume332
DOIs
Publication statusPublished - 1 Aug 2014
Event21st International Conference on Ion Beam Analysis (IBA) - Seattle, United States
Duration: 23 Jun 201328 Jun 2013

Keywords

  • Heavy ions
  • Ion beam analysis
  • Stopping power
  • Tantalum oxide

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