Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton

Ana Cláudia Marques, Jaime Faria, Patrícia Perdigão, Bruno M. M. Faustino, Riina Ritasalo, Katiuscia Costabello, Rui C. da Silva, Isabel Ferreira

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13 Citations (Scopus)
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Aluminium doped zinc oxide (AZO) films were grown by Atomic Layer Deposition (ALD) on yellow Kapton and transparent Kapton (type CS) substrates for large area flexible transparent thermoelectric applications, which performance relies on the thermoelectric properties of the transparent AZO films. Therefore, their adhesion to Kapton, environmental and bending stability were accessed. Plasma treatment on Kapton substrates improved films adhesion, reduced cracks formation, and enhanced electrical resistance stability over time, of importance for long term thermoelectric applications in external environment. While exposure to UV light intensity caused the films electrical resistance to vary, and therefore their maximum power density outputs (0.3–0.4 mW/cm3) for a constant temperature difference (∼10 °C), humidity exposure and consecutive bending up to a curvature radius above the critical one (∼18 mm) not. Testing whether the films can benefit from encapsulation revealed that this can provide extra bending stability and prevent contacts deterioration in the long term.

Original languageEnglish
Article number17919
JournalScientific Reports
Issue number1
Publication statusPublished - 1 Dec 2019


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