Sputtering preparation of silicon nitride thin films for gate dielectric applications

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationMaterials Science Forum - ADVANCED MATERIALS FORUM II
Pages69-72
Number of pages4
Volume455-456
DOIs
Publication statusPublished - Apr 2003
Event2nd International Materials Symposium -
Duration: 1 Jan 2003 → …

Conference

Conference2nd International Materials Symposium
Period1/01/03 → …

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