Sputtering preparation of silicon nitride thin films for gate dielectric applications

Luis Miguel Nunes Pereira; Hugo Manuel Brito Águas; Rui Alberto Garção Barreira do Nascimento Igreja; Rui M. S. Martins; Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins

doi:10.4028/www.scientific.net/MSF.455-456.69

Sputtering preparation of silicon nitride thin films for gate dielectric applications

Luis Miguel Nunes Pereira, Hugo Manuel Brito Águas, Rui Alberto Garção Barreira do Nascimento Igreja, Rui M. S. Martins, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins

DCM - Departamento de Ciência dos Materiais

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Materials Science Forum - ADVANCED MATERIALS FORUM II
Pages	69-72
Number of pages	4
Volume	455-456
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.455-456.69
Publication status	Published - Apr 2003
Event	2nd International Materials Symposium - Caparica, Portugal Duration: 14 Apr 2003 → 16 Apr 2003

Conference

Conference	2nd International Materials Symposium
Country/Territory	Portugal
City	Caparica
Period	14/04/03 → 16/04/03

Access to Document

10.4028/www.scientific.net/MSF.455-456.69

Cite this

@inproceedings{dbd24cd09a694b3fb09c69047b2d5fbe,

title = "Sputtering preparation of silicon nitride thin films for gate dielectric applications",

author = "Pereira, {Luis Miguel Nunes} and {\'A}guas, {Hugo Manuel Brito} and Igreja, {Rui Alberto Gar{\c c}{\~a}o Barreira do Nascimento} and Martins, {Rui M. S.} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2003",

month = apr,

doi = "10.4028/www.scientific.net/MSF.455-456.69",

language = "English",

volume = "455-456",

pages = "69--72",

booktitle = "Materials Science Forum - ADVANCED MATERIALS FORUM II",

note = "2nd International Materials Symposium ; Conference date: 14-04-2003 Through 16-04-2003",

}

Pereira, LMN , Águas, HMB , Igreja, RAGBDN, Martins, RMS, Fortunato, EMC & Martins, RFDP 2003, Sputtering preparation of silicon nitride thin films for gate dielectric applications. in Materials Science Forum - ADVANCED MATERIALS FORUM II. vol. 455-456, pp. 69-72, 2nd International Materials Symposium, Caparica, Portugal, 14/04/03. https://doi.org/10.4028/www.scientific.net/MSF.455-456.69

Sputtering preparation of silicon nitride thin films for gate dielectric applications. / Pereira, Luis Miguel Nunes ; Águas, Hugo Manuel Brito ; Igreja, Rui Alberto Garção Barreira do Nascimento et al.
Materials Science Forum - ADVANCED MATERIALS FORUM II. Vol. 455-456 2003. p. 69-72.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Sputtering preparation of silicon nitride thin films for gate dielectric applications

AU - Pereira, Luis Miguel Nunes

AU - Águas, Hugo Manuel Brito

AU - Igreja, Rui Alberto Garção Barreira do Nascimento

AU - Martins, Rui M. S.

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2003/4

Y1 - 2003/4

U2 - 10.4028/www.scientific.net/MSF.455-456.69

DO - 10.4028/www.scientific.net/MSF.455-456.69

M3 - Conference contribution

VL - 455-456

SP - 69

EP - 72

BT - Materials Science Forum - ADVANCED MATERIALS FORUM II

T2 - 2nd International Materials Symposium

Y2 - 14 April 2003 through 16 April 2003

ER -