@article{e9116cbe256e4b6ebca110bc53ac7533,
title = "Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: a round-robin characterization by different techniques",
keywords = "Mo/Si interferential mirror, Sputter depth profiling, Round-robin characterization, Glow discharge optical emission spectroscopy (GDOES), Time-of-flight low-energy ion scattering (TOF-LEIS), Secondary ion mass spectrometry (SIMS)",
author = "Alexander Tolstoguzov",
note = "Sem pdf conforme despacho.",
year = "2013",
month = jan,
day = "1",
language = "Unknown",
volume = "540",
pages = "96--105",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "NA",
}