Abstract
Molybdenum doped (0-1 at. %) indium oxide thin films with high near infrared (NIR) transparency and carrier mobility were deposited on Corning-1737 glass substrates at 400 degrees C by spray pyrolysis experimental technique. Films with mobility as high as similar to 149 cm(2)/V s were obtained when annealed in vacuum at 550 degrees C, which also possess carrier concentration of similar to 1x10(20) cm(-3) and resistivity as low as similar to 4.0x10(-4) Omega cm. Further, both the average visible transmittance (500-800 nm) and the average NIR transmittance are >83%. This clearly shows that the transmittance is extended well into the NIR region.
Original language | Unknown |
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Pages (from-to) | nr. 212101 |
Journal | Applied Physics Letters |
Volume | 94 |
Issue number | 21 |
DOIs | |
Publication status | Published - 1 Jan 2009 |