Spray deposited molybdenum doped indium oxide thin films with high near infrared transparency and carrier mobility

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Abstract

Molybdenum doped (0-1 at. %) indium oxide thin films with high near infrared (NIR) transparency and carrier mobility were deposited on Corning-1737 glass substrates at 400 degrees C by spray pyrolysis experimental technique. Films with mobility as high as similar to 149 cm(2)/V s were obtained when annealed in vacuum at 550 degrees C, which also possess carrier concentration of similar to 1x10(20) cm(-3) and resistivity as low as similar to 4.0x10(-4) Omega cm. Further, both the average visible transmittance (500-800 nm) and the average NIR transmittance are >83%. This clearly shows that the transmittance is extended well into the NIR region.
Original languageUnknown
Pages (from-to)nr. 212101
JournalApplied Physics Letters
Volume94
Issue number21
DOIs
Publication statusPublished - 1 Jan 2009

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