Spectroscopic ellipsometry study of amorphous silicon anodically oxidised

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Abstract

In this work, spectroscopic ellipsometry was used to characterise oxide films produced by anodic oxidation of amorphous silicon using an ethylene glycol (0.04 M KNO(3)) Solution. The data obtained show that the growth of the oxide is not only a function of the voltage applied, but also of the current density and of the time process. An empiric model based on a power law is proposed for the growth of the oxide using, as parameters, the voltages and the time process. The oxide produced shows porosity of approximately 12%, which can be reduced down to 6% under well-controlled growth conditions.
Original languageEnglish
Pages (from-to)345-349
Number of pages5
JournalTHIN SOLID FILMS
Volume427
Issue number1-2
DOIs
Publication statusPublished - 3 Mar 2003

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