In this paper, we study time-of-flight (TOF) mass-spectra of the Ar cluster beams obtained by nozzles with different diameters, at different source pressures, and ionizing electron energies. The TOF mass-spectra are measured at minimal electron energy, since there is a strong influence on the mass-spectra by the multiple ionization of the clusters. The cluster size derived from TOF mass-spectra is considered as a function of the condensation parameter Γ * . Attenuation of the cluster current due to collisions with residual gas is also studied. An estimation of the relative cluster size by the current attenuation is proposed.
|Journal||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - 1 Jul 2019|
- Condensation parameter
- Gas cluster ion beam
- Mean cluster size