Simulation of sputtering induced by light ions

O. M. N. D. Teodoro; A. M. C. Moutinho

doi:10.1016/S0039-6028(01)00719-1

Simulation of sputtering induced by light ions

O. M. N. D. Teodoro, A. M. C. Moutinho

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.

Original language	English
Pages (from-to)	1392-1398
Number of pages	7
Journal	Surface Science
Volume	482-485
Issue number	PART 2
DOIs	https://doi.org/10.1016/S0039-6028(01)00719-1
Publication status	Published - 1 Jan 2001
Event	19th European Conference on Surface Science (ECOSS-19) - Madrid, Spain Duration: 5 Sep 2005 → 8 Sep 2005

Keywords

Alkaline earth metals
Atom emission
Atom-solid interactions
Computer simulations
Polycrystalline surfaces
Sputtering

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title = "Simulation of sputtering induced by light ions",

abstract = "A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.",

keywords = "Alkaline earth metals, Atom emission, Atom-solid interactions, Computer simulations, Polycrystalline surfaces, Sputtering",

author = "Teodoro, {O. M. N. D.} and Moutinho, {A. M. C.}",

note = "This work was partially supported by the project Praxis 3/31/MMA/1764/95 of the Portuguese Foundation for Science and Technology.; 19th European Conference on Surface Science (ECOSS-19) ; Conference date: 05-09-2005 Through 08-09-2005",

year = "2001",

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doi = "10.1016/S0039-6028(01)00719-1",

language = "English",

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pages = "1392--1398",

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TY - JOUR

T1 - Simulation of sputtering induced by light ions

AU - Teodoro, O. M. N. D.

AU - Moutinho, A. M. C.

N1 - This work was partially supported by the project Praxis 3/31/MMA/1764/95 of the Portuguese Foundation for Science and Technology.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.

AB - A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.

KW - Alkaline earth metals

KW - Atom emission

KW - Atom-solid interactions

KW - Computer simulations

KW - Polycrystalline surfaces

KW - Sputtering

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U2 - 10.1016/S0039-6028(01)00719-1

DO - 10.1016/S0039-6028(01)00719-1

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VL - 482-485

SP - 1392

EP - 1398

JO - Surface Science

JF - Surface Science

SN - 0039-6028

IS - PART 2

T2 - 19th European Conference on Surface Science (ECOSS-19)

Y2 - 5 September 2005 through 8 September 2005

ER -

Simulation of sputtering induced by light ions

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Keywords

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