Simulation of sputtering induced by light ions

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

A new simulation code named projectile surface interaction simulation (PSIS) has been used to study the extension of the collision cascades in sputtering induced by light projectiles. PSIS is based on the binary collision approach in a crystalline target. It is similar to the time independent version of MARLOWE but it takes advantage of the magic formula proposed by Biersack and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sputtering is produced mainly by direct emission or short-range cascades. However, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectile and of target atoms in the solid is proposed to explain these results.

Original languageEnglish
Pages (from-to)1392-1398
Number of pages7
JournalSurface Science
Volume482-485
Issue numberPART 2
DOIs
Publication statusPublished - 1 Jan 2001
Event19th European Conference on Surface Science (ECOSS-19) - Madrid, Spain
Duration: 5 Sep 20058 Sep 2005

Keywords

  • Alkaline earth metals
  • Atom emission
  • Atom-solid interactions
  • Computer simulations
  • Polycrystalline surfaces
  • Sputtering

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