Simulation analysis of a thin film semiconductor MMI 3dB splitter operating in the visible range

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Citations (Scopus)

Abstract

In this paper we present a simulation study that intends to characterize the influence of defects introduced by manufacturing processes on the geometry of a semiconductor structure suitable to be used as a multimode interference (MMI) 3 dB power splitter. Consequently, these defects will represent refractive index fluctuations which, on their turn, will drastically affect the propagation conditions within the structure. Our simulations were conducted on a software platform that implements both Beam Propagation and FDTD numerical methods. This work supports the development of a biomedical plasmonic sensor, which is based on the coupling between the propagating modes in a dielectric waveguide and the surface plasmon mode that is generated on an overlaid metallic thin film, and where the output readout is achieved through an a-Si:H photodiode. By using a multimode interference 1×2 power splitter, this sensor device can utilize the non-sensing arm as a reference one, greatly facilitating its calibration and enhanced performance. Amorphous silicon can be deposited by PECVD processes at temperatures lower than 300°C, an attractive characteristic which makes it back-end compatible to CMOS fabrication processes. As the spectral sensitivity of amorphous silicon is restricted to the visible range, this sensing device should be operating on a wavelength not higher than 700 nm, thus a-SiNx has been the material hereby proposed for both waveguides and MMI power splitter.

Original languageEnglish
Title of host publicationFourth International Conference on Applications of Optics and Photonics
EditorsManuel F. M. Costa
PublisherSPIE-International Society for Optical Engineering
ISBN (Electronic)9781510631632
DOIs
Publication statusPublished - 2019
Event4th International Conference on Applications of Optics and Photonics, AOP 2019 - Lisbon, Portugal
Duration: 31 May 20194 Jun 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE-International Society for Optical Engineering
Volume11207
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference4th International Conference on Applications of Optics and Photonics, AOP 2019
CountryPortugal
CityLisbon
Period31/05/194/06/19

Keywords

  • 3 dB splitter
  • Beam Propagation Method
  • Finite Differences Time Domain
  • Multimode Interference
  • Surface Plasmon Resonance

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