Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Isabel Maria Mercês Ferreira; M. Elisabete V Costa; Luis Miguel Nunes Pereira; Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins

doi:10.1016/S0169-4332(01)00663-8

Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

Isabel Maria Mercês Ferreira, M. Elisabete V Costa, Luis Miguel Nunes Pereira, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Original language	English
Pages (from-to)	8-19
Journal	Applied Surface Science
Volume	184
Issue number	1-4
DOIs	https://doi.org/10.1016/S0169-4332(01)00663-8
Publication status	Published - 1 Jan 2001

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10.1016/S0169-4332(01)00663-8

Cite this

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title = "Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques",

author = "Ferreira, {Isabel Maria Merc{\^e}s} and Costa, {M. Elisabete V} and Pereira, {Luis Miguel Nunes} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2001",

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doi = "10.1016/S0169-4332(01)00663-8",

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T1 - Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques

AU - Ferreira, Isabel Maria Mercês

AU - Costa, M. Elisabete V

AU - Pereira, Luis Miguel Nunes

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2001/1/1

Y1 - 2001/1/1

U2 - 10.1016/S0169-4332(01)00663-8

DO - 10.1016/S0169-4332(01)00663-8

M3 - Article

SN - 0169-4332

VL - 184

SP - 8

EP - 19

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-4

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