Original language | English |
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Patent number | EP3538883 |
IPC | H01L 29/ 786 A I, G01N27/414 |
Priority date | 14/03/17 |
Filing date | 14/06/19 |
Publication status | Published - 18 Sept 2019 |
Sensitive field effect device and manufacturing method thereof
Pedro Miguel Cândido Barquinha (Inventor), Rodrigo Ferrão De Paiva Martins (Inventor), Elvira Maria Correia Fortunato (Inventor), Tobias Cramer (Inventor), Beatrice Fraboni (Inventor)
Research output: Patent › Regional/Other National Application