Role of the thickness on the electrical and optical performances of undoped polycrystalline zinc oxide films used as UV detectors

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Abstract

In this paper we present the effect of thickness on the electrical and optical properties of intrinsic/nondoped zinc oxide thin films deposited at room temperature by radio frequency magnetron sputtering, able to be used as a semiconductor material on electronic devices, like for example ozone gas sensors and ultraviolet detectors. These films are polycrystalline with a c-axis preferential orientation parallel to the substrate. The films present a resistivity that varies from 5.0 × 104 Ω cm to 1.0 × 109 Ω cm with an optical visible transmittance of 85%. The sensor response exceeds more than five orders of magnitude when exposed to UV light recovering to the initial state in the presence of ozone.
Original languageEnglish
Pages (from-to)1448-1452
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume352
Issue number9-20
DOIs
Publication statusPublished - 15 Jun 2006

Keywords

  • II–VI Semiconductors
  • Sensors
  • Conductivity
  • Sputtering

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