TY - JOUR
T1 - Role of the gas pressure and hydrogen dilution on the properties of large area nanocrystalline p-type silicon films produced by hot wire technique
AU - Ferreira, Isabel Maria Mercês
AU - Cabrita, A.
AU - Braz Fernandes, Francisco Manuel
AU - Fortunato, Elvira Maria Correia
AU - Martins, Rodrigo Ferrão de Paiva
N1 - CENIMAT and PRAXIS/PICTM/12094/1998 project and H. Alpha Solar project under contract No. ERK&CT-1999-00004
PY - 2001/1/1
Y1 - 2001/1/1
N2 - This paper reports results on the role of high hydrogen dilution (above 80%) on the electro-optical and structural properties of boron doped silicon films produced by hot wire chemical vapor deposition (HW-CVD) technique, keeping constant the filament temperature. The structural, compositional, morphological, electrical and optical properties achieved show that the films present excellent homogeneity over the entire 10 X 10 cm deposited area. These results were obtained for films produced at gas pressures below 66.5 Pa, in spite of the high flow rate used.
AB - This paper reports results on the role of high hydrogen dilution (above 80%) on the electro-optical and structural properties of boron doped silicon films produced by hot wire chemical vapor deposition (HW-CVD) technique, keeping constant the filament temperature. The structural, compositional, morphological, electrical and optical properties achieved show that the films present excellent homogeneity over the entire 10 X 10 cm deposited area. These results were obtained for films produced at gas pressures below 66.5 Pa, in spite of the high flow rate used.
KW - large area film properties
KW - hot wire technique
KW - boron-doped films
U2 - 10.1016/S0928-4931(01)00250-8
DO - 10.1016/S0928-4931(01)00250-8
M3 - Article
SN - 0928-4931
VL - 15
SP - 141
EP - 144
JO - MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
JF - MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS
IS - 1-2
ER -