Role of rf power on the properties of undoped SnOx films deposited by rf-PERTE at low substrate temperature

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2 Citations (Scopus)

Original language	Unknown
Pages (from-to)	3893-3896
Journal	Surface & Coatings Technology
Volume	202
Issue number	16
DOIs	https://doi.org/10.1016/j.surfcoat.2008.01.033
Publication status	Published - 1 Jan 2008

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@article{b8d5051978dc4fb7b31e1279cf943157,

title = "Role of rf power on the properties of undoped SnOx films deposited by rf-PERTE at low substrate temperature",

keywords = "SnOx, rf-PERTE, plasma, low temperature, thin film, transparent conductive oxide",

author = "Lavareda, {Guilherme Ant{\'o}nio Rodrigues} and Carvalho, {Carlos Alberto Nunes de}",

year = "2008",

month = jan,

day = "1",

doi = "10.1016/j.surfcoat.2008.01.033",

language = "Unknown",

volume = "202",

pages = "3893--3896",

journal = "Surface & Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier Science B.V., Amsterdam.",

number = "16",

}

TY - JOUR

T1 - Role of rf power on the properties of undoped SnOx films deposited by rf-PERTE at low substrate temperature

AU - Lavareda, Guilherme António Rodrigues

AU - Carvalho, Carlos Alberto Nunes de

PY - 2008/1/1

Y1 - 2008/1/1

KW - SnOx

KW - rf-PERTE

KW - plasma

KW - low temperature

KW - thin film

KW - transparent conductive oxide

U2 - 10.1016/j.surfcoat.2008.01.033

DO - 10.1016/j.surfcoat.2008.01.033

M3 - Article

VL - 202

SP - 3893

EP - 3896

JO - Surface & Coatings Technology

JF - Surface & Coatings Technology

SN - 0257-8972

IS - 16

ER -