Pt(CO)2Cl2 fragmentation upon low energy electron interactions

F. Ferreira Da Silva, R. Thorman, H. Lu, L. McElwee-White, O. Ingólfsson

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Synopsis: In the present communication we present low energy electron interactions with Pt(CO)2Cl2, a FEBID precursor. Electron impact ionization as well as dissociative electron attachment studies are discussed.

Original languageEnglish
Article number062035
Number of pages2
JournalJournal of Physics: Conference Series
Volume875
Issue number7
DOIs
Publication statusPublished - 18 Aug 2017
Event30th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC 2017) - Cairns, Australia
Duration: 26 Jul 20171 Aug 2017
Conference number: 30th

Keywords

  • BEAM-INDUCED DEPOSITION

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