Synopsis: In the present communication we present low energy electron interactions with Pt(CO)2Cl2, a FEBID precursor. Electron impact ionization as well as dissociative electron attachment studies are discussed.
|Number of pages||2|
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 18 Aug 2017|
|Event||30th International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC 2017) - Cairns, Australia|
Duration: 26 Jul 2017 → 1 Aug 2017
Conference number: 30th
- BEAM-INDUCED DEPOSITION