Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis

Patrícia Nunes, Elvira Fortunato, Rodrigo Martins, Paula Vilarinho

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The most common techniques used to produce ZnO thin films are the spray pyrolysis and the magnetron sputtering techniques, low and high cost processes respectively. The aim of this work is to compare the properties of the films produced by these two techniques. The predominant difference observed was on the morphological properties. The films produced by spray pyrolysis have a rougher surface than the ones obtained by sputtering. Also the effect of the thermal annealing treatment is much more prononnced for the ZnO thin films produced by spray pyrolysis. After heat treatment films exhibit similar electrical properties and their application to optoelectronic devices is demonstrated.

Original languageEnglish
Pages (from-to)424-427
Number of pages4
JournalBioceramics 18, Pts 1 And 2
Volume230-232
Issue number3
Publication statusPublished - 2002

Keywords

  • Spray Pyrolysis
  • Sputtering
  • Zinc Oxide Thin Films

Fingerprint Dive into the research topics of 'Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis'. Together they form a unique fingerprint.

Cite this