In this work we present a study of the properties of ZnO thin films produced by spray pyrolysis and r.f. magnetron sputtering. Before the annealing treatment the properties of the films are very similar, which means that the films produced by both techniques could be used on optoelectronic devices. However spray pyrolysis is a more simple and cheap technique than sputtering, but with this last technique the thin films exhibit a higher uniformity.
|Title of host publication||Advanced Materials and Devices for Large-Area Electronics|
|Number of pages||6|
|Publication status||Published - 2001|
|Event||2001 MRS Spring Meeting - San Francisco, United States|
Duration: 16 Apr 2001 → 20 Apr 2001
|Conference||2001 MRS Spring Meeting|
|Period||16/04/01 → 20/04/01|