Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates-dependence on oxygen partial pressure

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@article{07d066fcd2f74fbea1dbef608b20a3cb,

title = "Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates-dependence on oxygen partial pressure",

author = "Carvalho, {Carlos Alberto Nunes de} and Lavareda, {Guilherme Ant{\'o}nio Rodrigues} and Fortunato, {Elvira Maria Correia} and Ana Amaral",

year = "2003",

month = mar,

day = "3",

doi = "10.1016/S0040-6090(02)01213-0",

language = "English",

volume = "427",

pages = "215--218",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates-dependence on oxygen partial pressure

AU - Carvalho, Carlos Alberto Nunes de

AU - Lavareda, Guilherme António Rodrigues

AU - Fortunato, Elvira Maria Correia

AU - Amaral, Ana

PY - 2003/3/3

Y1 - 2003/3/3

U2 - 10.1016/S0040-6090(02)01213-0

DO - 10.1016/S0040-6090(02)01213-0

M3 - Article

SN - 0040-6090

VL - 427

SP - 215

EP - 218

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -