Abstract
The influence of the radio frequency (rf) electrode distance from substrates on the properties of indium tin oxide (ITO) films (90 nm thick) deposited by plasma enhanced RTE onto unheated polymer substrates is studied. This distance varied in the range 6-12 cm. The polymeric substrate used was PET. Results showed that (1) an average visible transmittance of around 80% and (2) an electrical resistivity of 1.5×10-3 Ωcm are obtained for ITO films deposited on PET with the rf electrode 10 cm from substrates. On glass, the value of the electrical resistivity obtained is slightly lower ≈9×10-4 Ωcm. A study of the ITO thickness uniformity on a polymer substrate of reasonable area (15×15 cm2) revealed an uniformity of about 80%
| Original language | English |
|---|---|
| Pages (from-to) | 630-633 |
| Number of pages | 4 |
| Journal | Journal of Non-Crystalline Solids |
| Volume | 338-40 |
| Issue number | 1 SPEC. ISS. |
| DOIs | |
| Publication status | Published - 15 Jun 2004 |
Keywords
- Deposition
- Electrochemical electrodesE
- Evaporation
- Hall effect
- Heat treatment
- Moisture
- Scanning electron microscopy
- Semiconducting indium compounds
- Synthesis (chemical)
- Thin films
- Free carrier concentration
- Polymeric substrate
- Radio frequency
- Reactive thermal evaporation
- Radio frequencyy
- Polymers