Properties of a-Si : H TFTs using silicon carbonitride as dielectric

Guilherme António Rodrigues Lavareda; Carlos Alberto Nunes de Carvalho; Elvira Maria Correia Fortunato; Ana Amaral; Ariel Rita L. Ramos

doi:10.1016/j.jnoncrysol.2004.03.094

Properties of a-Si : H TFTs using silicon carbonitride as dielectric

Guilherme António Rodrigues Lavareda, Carlos Alberto Nunes de Carvalho, Elvira Maria Correia Fortunato, Ana Amaral, Ariel Rita L. Ramos

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Original language	English
Pages (from-to)	797-801
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	338-40
Issue number	1 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.jnoncrysol.2004.03.094
Publication status	Published - 15 Jun 2004

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10.1016/j.jnoncrysol.2004.03.094

Cite this

@article{1f0406bed5dc482d8ac08f7c281a7560,

title = "Properties of a-Si : H TFTs using silicon carbonitride as dielectric",

author = "Lavareda, {Guilherme Ant{\'o}nio Rodrigues} and Carvalho, {Carlos Alberto Nunes de} and Fortunato, {Elvira Maria Correia} and Ana Amaral and Ramos, {Ariel Rita L.}",

year = "2004",

month = jun,

day = "15",

doi = "10.1016/j.jnoncrysol.2004.03.094",

language = "English",

volume = "338-40",

pages = "797--801",

journal = "Journal of Non-Crystalline Solids",

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TY - JOUR

T1 - Properties of a-Si : H TFTs using silicon carbonitride as dielectric

AU - Lavareda, Guilherme António Rodrigues

AU - Carvalho, Carlos Alberto Nunes de

AU - Fortunato, Elvira Maria Correia

AU - Amaral, Ana

AU - Ramos, Ariel Rita L.

PY - 2004/6/15

Y1 - 2004/6/15

U2 - 10.1016/j.jnoncrysol.2004.03.094

DO - 10.1016/j.jnoncrysol.2004.03.094

M3 - Article

VL - 338-40

SP - 797

EP - 801

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

IS - 1 SPEC. ISS.

ER -