Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

S. F. Belykh; A. D. Bekkerman; A. B. Tolstogouzov; A. A. Lozovan; D. J. Fu

doi:10.1134/S1027451018010056

Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

S. F. Belykh, A. D. Bekkerman, A. B. Tolstogouzov, A. A. Lozovan, D. J. Fu

Research output: Contribution to journal › Article › peer-review

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Abstract

The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.

Original language	English
Pages (from-to)	33-37
Number of pages	5
Journal	Journal of Surface Investigation
Volume	12
Issue number	1
DOIs	https://doi.org/10.1134/S1027451018010056
Publication status	Published - 1 Jan 2018

Keywords

cascade amplification of cluster ion currents
cluster ion source
ion sputtering

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title = "Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions",

abstract = "The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.",

keywords = "cascade amplification of cluster ion currents, cluster ion source, ion sputtering",

author = "Belykh, \{S. F.\} and Bekkerman, \{A. D.\} and Tolstogouzov, \{A. B.\} and Lozovan, \{A. A.\} and Fu, \{D. J.\}",

note = "This work was supported by the Ministry of Education and Science of the Russian Federation under the state task for research efforts (project code 3087).",

year = "2018",

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AU - Belykh, S. F.

AU - Bekkerman, A. D.

AU - Tolstogouzov, A. B.

AU - Lozovan, A. A.

AU - Fu, D. J.

N1 - This work was supported by the Ministry of Education and Science of the Russian Federation under the state task for research efforts (project code 3087).

PY - 2018/1/1

Y1 - 2018/1/1

N2 - The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.

AB - The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.

KW - cascade amplification of cluster ion currents

KW - cluster ion source

KW - ion sputtering

UR - https://www.scopus.com/pages/publications/85045264140

U2 - 10.1134/S1027451018010056

DO - 10.1134/S1027451018010056

M3 - Article

AN - SCOPUS:85045264140

SN - 1027-4510

VL - 12

SP - 33

EP - 37

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

IS - 1

ER -

Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

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Keywords

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