Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

S. F. Belykh, A. D. Bekkerman, A. B. Tolstogouzov, A. A. Lozovan, D. J. Fu

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.

Original languageEnglish
Pages (from-to)33-37
Number of pages5
JournalJournal of Surface Investigation
Volume12
Issue number1
DOIs
Publication statusPublished - 1 Jan 2018

Keywords

  • cascade amplification of cluster ion currents
  • cluster ion source
  • ion sputtering

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