Performances presented by zinc oxide thin films deposited by spray pyrolysis

P. Nunes, B. Fernandes, E. Fortunato, P. Vilarinho, R. Martins

Research output: Contribution to journalArticlepeer-review

179 Citations (Scopus)


The effect of doping and annealing atmosphere on the performances of zinc oxide thin films prepared by spray pyrolysis have been studied. The results show that the way doping influences the electrical and structural properties depends also on the characteristics of the doping element. Annealing the as-deposited films in an inert atmosphere leads to a substantial reduction in the resistivity of the films deposited and to an increase on the degree of film's crystallinity.

Original languageEnglish
Pages (from-to)176-179
Number of pages4
JournalThin Solid Films
Issue number1-2
Publication statusPublished - 11 Jan 1999


  • Coatings
  • Deposition process
  • Electrical properties
  • Optical properties
  • X-ray diffraction
  • Zinc oxide


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