Abstract
The effect of doping and annealing atmosphere on the performances of zinc oxide thin films prepared by spray pyrolysis have been studied. The results show that the way doping influences the electrical and structural properties depends also on the characteristics of the doping element. Annealing the as-deposited films in an inert atmosphere leads to a substantial reduction in the resistivity of the films deposited and to an increase on the degree of film's crystallinity.
| Original language | English |
|---|---|
| Pages (from-to) | 176-179 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 337 |
| Issue number | 1-2 |
| Publication status | Published - 11 Jan 1999 |
Keywords
- Coatings
- Deposition process
- Electrical properties
- Optical properties
- X-ray diffraction
- Zinc oxide