Performances presented by zinc oxide thin films deposited by r.f. magnetron sputtering

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@article{1a677c0d77fa4b48a3522f8a8e3cb339,

title = "Performances presented by zinc oxide thin films deposited by r.f. magnetron sputtering",

author = "Patr{\'i}cia Nunes and Daniel Costa and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2002",

month = jan,

day = "1",

doi = "10.1016/S0042-207X(01)00323-2",

language = "English",

volume = "64",

pages = "293--297",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier",

number = "3-4",

}

TY - JOUR

T1 - Performances presented by zinc oxide thin films deposited by r.f. magnetron sputtering

AU - Nunes, Patrícia

AU - Costa, Daniel

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2002/1/1

Y1 - 2002/1/1

U2 - 10.1016/S0042-207X(01)00323-2

DO - 10.1016/S0042-207X(01)00323-2

M3 - Article

SN - 0042-207X

VL - 64

SP - 293

EP - 297

JO - Vacuum

JF - Vacuum

IS - 3-4

ER -