Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

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2 Citations (Scopus)

Abstract

This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

Original languageEnglish
Pages (from-to)148-156
Number of pages9
JournalTHIN SOLID FILMS
Volume272
Issue number1
DOIs
Publication statusPublished - 1 Jan 1996

Keywords

  • Amorphous materials
  • Electrical properties and measurements
  • Optical properties
  • Silicon

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