Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Elvira Fortunato; Guilherme Lavareda; Fernando Soares; Rodrigo Martins

doi:10.1016/0040-6090(95)06976-3

Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Elvira Fortunato, Guilherme Lavareda, Fernando Soares, Rodrigo Martins

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

Original language	English
Pages (from-to)	148-156
Number of pages	9
Journal	Thin Solid Films
Volume	272
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(95)06976-3
Publication status	Published - 1 Jan 1996

Keywords

Amorphous materials
Electrical properties and measurements
Optical properties
Silicon

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10.1016/0040-6090(95)06976-3

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@article{6d434b9ed0bc414f906a8834230e6606,

title = "Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon",

abstract = "This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.",

keywords = "Amorphous materials, Electrical properties and measurements, Optical properties, Silicon",

author = "Elvira Fortunato and Guilherme Lavareda and Fernando Soares and Rodrigo Martins",

year = "1996",

month = jan,

day = "1",

doi = "10.1016/0040-6090(95)06976-3",

language = "English",

volume = "272",

pages = "148--156",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

AU - Fortunato, Elvira

AU - Lavareda, Guilherme

AU - Soares, Fernando

AU - Martins, Rodrigo

PY - 1996/1/1

Y1 - 1996/1/1

N2 - This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

AB - This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

KW - Amorphous materials

KW - Electrical properties and measurements

KW - Optical properties

KW - Silicon

UR - http://www.scopus.com/inward/record.url?scp=0029772806&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(95)06976-3

DO - 10.1016/0040-6090(95)06976-3

M3 - Article

AN - SCOPUS:0029772806

VL - 272

SP - 148

EP - 156

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 1

ER -

Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Abstract

Keywords

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