Abstract
This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.
Original language | English |
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Pages (from-to) | 148-156 |
Number of pages | 9 |
Journal | Thin Solid Films |
Volume | 272 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Jan 1996 |
Keywords
- Amorphous materials
- Electrical properties and measurements
- Optical properties
- Silicon