Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Elvira Fortunato; Guilherme Lavareda; Fernando Soares; Rodrigo Martins

doi:10.1016/0040-6090(95)06976-3

Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Elvira Fortunato, Guilherme Lavareda, Fernando Soares, Rodrigo Martins

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

Original language	English
Pages (from-to)	148-156
Number of pages	9
Journal	Thin Solid Films
Volume	272
Issue number	1
DOIs	https://doi.org/10.1016/0040-6090(95)06976-3
Publication status	Published - 1 Jan 1996

Keywords

Amorphous materials
Electrical properties and measurements
Optical properties
Silicon

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10.1016/0040-6090(95)06976-3

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abstract = "This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.",

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AU - Soares, Fernando

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AB - This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

KW - Amorphous materials

KW - Electrical properties and measurements

KW - Optical properties

KW - Silicon

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Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Abstract

Keywords

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