TY - JOUR
T1 - Performances of an optical ruler based on one-dimensional hydrogenated amorphous Si position-sensitive detectors produced using different metal contacts
AU - Fortunato, E.
AU - Teodoro, P.
AU - Silva, Vitor M. A.
AU - Ferreira, I.
AU - Nunes, Y.
AU - Guimarães, Nuno
AU - Soares, Fernando M.
AU - Giuliani, F.
AU - Popovic, G.
AU - Brener, W.
AU - Martins, R.
PY - 2000/1/1
Y1 - 2000/1/1
N2 - The aim of this work is to determine the role of different metal contacts on the performances of one-dimensional thin-film position-sensitive detectors produced by plasma-enhanced chemical vapour deposition, to be used in optical rulers for alignment applications. The device consists on an indium tin oxide/p-i-n structure where the metal contacts used were based on Al, Al + Cu and Ag. The results achieved show that the contact mainly influences the final sensor range by limiting the magnitude of the analogue signals recorded. In spite of soldering problems the Al contact was the contact that lead to better discrimination of the sensor, with a nonlinearity of ±0.8% and a fall-off parameter of 3.2 × 10-3 cm-1. The Al + Cu contact also exhibits good performances (nonlinearity, of ±1.1%; fall-off parameter, 1.4 × 10-2 cm-1) and should be chosen since it is much easier to solder but requires protection against oxidation. The integration of these sensors on the optical ruler lead to the production of a system with a response time below 0.5 ms, an accuracy better than ±1% and a mechanical precision of better than 0.25 mm in 100 mm, with a full-scale noise below ±0.1%.
AB - The aim of this work is to determine the role of different metal contacts on the performances of one-dimensional thin-film position-sensitive detectors produced by plasma-enhanced chemical vapour deposition, to be used in optical rulers for alignment applications. The device consists on an indium tin oxide/p-i-n structure where the metal contacts used were based on Al, Al + Cu and Ag. The results achieved show that the contact mainly influences the final sensor range by limiting the magnitude of the analogue signals recorded. In spite of soldering problems the Al contact was the contact that lead to better discrimination of the sensor, with a nonlinearity of ±0.8% and a fall-off parameter of 3.2 × 10-3 cm-1. The Al + Cu contact also exhibits good performances (nonlinearity, of ±1.1%; fall-off parameter, 1.4 × 10-2 cm-1) and should be chosen since it is much easier to solder but requires protection against oxidation. The integration of these sensors on the optical ruler lead to the production of a system with a response time below 0.5 ms, an accuracy better than ±1% and a mechanical precision of better than 0.25 mm in 100 mm, with a full-scale noise below ±0.1%.
UR - http://www.scopus.com/inward/record.url?scp=18744388272&partnerID=8YFLogxK
U2 - 10.1080/13642810008209782
DO - 10.1080/13642810008209782
M3 - Conference article
AN - SCOPUS:18744388272
SN - 1364-2812
VL - 80
SP - 765
EP - 774
JO - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
JF - Philosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
IS - 4
T2 - International Workshop on Semiconducting and Superconducting Materials
Y2 - 1 February 1999 through 1 February 1999
ER -