Performances of an optical ruler based on one-dimensional hydrogenated amorphous Si position-sensitive detectors produced using different metal contacts

E. Fortunato, P. Teodoro, Vitor M. A. Silva, I. Ferreira, Y. Nunes, Nuno Guimarães, Fernando M. Soares, F. Giuliani, G. Popovic, W. Brener, R. Martins

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

The aim of this work is to determine the role of different metal contacts on the performances of one-dimensional thin-film position-sensitive detectors produced by plasma-enhanced chemical vapour deposition, to be used in optical rulers for alignment applications. The device consists on an indium tin oxide/p-i-n structure where the metal contacts used were based on Al, Al + Cu and Ag. The results achieved show that the contact mainly influences the final sensor range by limiting the magnitude of the analogue signals recorded. In spite of soldering problems the Al contact was the contact that lead to better discrimination of the sensor, with a nonlinearity of ±0.8% and a fall-off parameter of 3.2 × 10-3 cm-1. The Al + Cu contact also exhibits good performances (nonlinearity, of ±1.1%; fall-off parameter, 1.4 × 10-2 cm-1) and should be chosen since it is much easier to solder but requires protection against oxidation. The integration of these sensors on the optical ruler lead to the production of a system with a response time below 0.5 ms, an accuracy better than ±1% and a mechanical precision of better than 0.25 mm in 100 mm, with a full-scale noise below ±0.1%.

Original languageEnglish
Pages (from-to)765-774
Number of pages10
JournalPhilosophical Magazine B: Physics of Condensed Matter; Statistical Mechanics, Electronic, Optical and Magnetic Properties
Volume80
Issue number4
DOIs
Publication statusPublished - 1 Jan 2000
EventInternational Workshop on Semiconducting and Superconducting Materials - Torino, Italy
Duration: 1 Feb 19991 Feb 1999

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