P-type oxide alloys based on copper oxides, tin oxides, tin-copper alloy oxides and metal alloy thereof, and nickel oxide, with embedded metals thereof, fabrication process and use thereof

Pedro Miguel Cândido Barquinha (Inventor), Rodrigo Ferrão de Paiva Martins (Inventor), Elvira Maria Correia Fortunato (Inventor), Raquel Barros (Inventor), Nuno Filipe de Oliveira Correia (Inventor), Vitor Manuel Loureiro Figueiredo (Inventor), Sang Hee Ko Park (Inventor), Chi Sun Hwang (Inventor)

Research output: PatentInternational PCT application

Abstract

The present invention relates to thin films comprising non- stoichiometric monoxides of: copper (OCu2)x with embedded cubic metal copper (Cucy) [ (OCu2) x+ (Cu1-2) y, wherein 0.05=xax with embedded metal tin (Snßx) [ (OSn) z+ (Sn1-2)w wherein 0.05cx-Snßx alloys with embedded metal Sn and Cu [ (O-Cu- Sn) a+ (Cua-Snß)b with 0x with embedded Ni and Sn species [ (O-Ni )a+ (Nia-Snß)b with 0<a<2 and 0<ß<2, wherein 0.05=a<1 and 0.01=b=0.9]; or combinations thereof, with amorphous, or nanocrystalline, or polycrystalline structure, either doped or not, with impurities such as zirconium, nitrogen or fluorine, for the fabrication of CMOS or TFT devices, with active matrices for LCD or OLED, fabrication of logic circuits, among others, using rigid or flexible substrates, wherein a protection layer, such as SU8 or the like, or silicon oxide or silicon nitride films are used for encapsulation.
Original languageEnglish
Patent numberWO2011125036
Filing date6/04/11
Publication statusPublished - 13 Oct 2011

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