Optically transparent composite diamond/Ti electrodes

Petr Ashcheulov, Andrew Taylor, Joris More-Chevalier, Alexander Kovalenko, Zdeněk Remeš, Jan Drahokoupil, Pavel Hubík, Ladislav Fekete, Ladislav Klimša, Jaromír Kopeček, Jarmila Remiášová, Michal Kohout, Otakar Frank, Ladislav Kavan, Vincent Mortet

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

It is important for electro-optical applications of nanocrystalline diamond (NCD) films to achieve high optical transparency with low electrical resistivity. However, currently fabrication of highly transparent NCD films with reasonable electrical conductivity remains a challenge – any increase in conductivity simultaneously reduces transparency. Here, we report on fabrication of highly conductive and yet highly transparent electrodes based on boron-doped nanocrystalline diamond (B-NCD) films and Ti grids. We studied B-NCD films with variable boron content and thickness to determine preferable electrical and optical characteristics. Composite electrodes with a sheet resistance of 200 Ω/sq and optical transparency of 80% have been obtained by the integration of a thin nanostructured Ti-grid, sandwiched between the glass substrate and B-NCD layer.

Original languageEnglish
Pages (from-to)179-189
Number of pages11
JournalCarbon
Volume119
DOIs
Publication statusPublished - 1 Aug 2017

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