New materials for large-area position-sensitive detectors

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12 Citations (Scopus)

Abstract

Large-area thin-film position-sensitive detectors (TFPSDs) using the hydrogenated amorphous silicon (a-Si:H) technology are presented. The detection accuracy of these devices (lengths of about 80 mm) is better than ±0.5% of the value of the full scale of the sensor, the spatial resolution is better than ±20 μm, the non-linearities measured are below ±2% and the frequency response is in the range of a few kilohertz, compatible with the sampling frequency of most electromechanical assembling/control systems. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems.

Original languageEnglish
Pages (from-to)244-248
Number of pages5
JournalSensors and Actuators, A: Physical
Volume68
Issue number1-3
DOIs
Publication statusPublished - 15 Jun 1998
EventEUROSENSORS XI Meeting - Warsaw, Poland
Duration: 21 Sep 199724 Sep 1997

Keywords

  • Amorphous silicon
  • Large-area devices
  • Position sensors
  • Thin films

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