New materials for large-area position-sensitive detectors

Elvira Fortunato; Rodrigo Martins

doi:10.1016/S0924-4247(98)00012-0

New materials for large-area position-sensitive detectors

Elvira Fortunato, Rodrigo Martins

Research output: Contribution to journal › Conference article › peer-review

13 Citations (Scopus)

Abstract

Large-area thin-film position-sensitive detectors (TFPSDs) using the hydrogenated amorphous silicon (a-Si:H) technology are presented. The detection accuracy of these devices (lengths of about 80 mm) is better than ±0.5% of the value of the full scale of the sensor, the spatial resolution is better than ±20 μm, the non-linearities measured are below ±2% and the frequency response is in the range of a few kilohertz, compatible with the sampling frequency of most electromechanical assembling/control systems. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems.

Original language	English
Pages (from-to)	244-248
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	68
Issue number	1-3
DOIs	https://doi.org/10.1016/S0924-4247(98)00012-0
Publication status	Published - 15 Jun 1998
Event	EUROSENSORS XI Meeting - Warsaw, Poland Duration: 21 Sept 1997 → 24 Sept 1997

Keywords

Amorphous silicon
Large-area devices
Position sensors
Thin films

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10.1016/S0924-4247(98)00012-0Licence: CC BY-NC-ND

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@article{5e8e17fd42974783b827dd1f41c4f137,

title = "New materials for large-area position-sensitive detectors",

abstract = "Large-area thin-film position-sensitive detectors (TFPSDs) using the hydrogenated amorphous silicon (a-Si:H) technology are presented. The detection accuracy of these devices (lengths of about 80 mm) is better than ±0.5% of the value of the full scale of the sensor, the spatial resolution is better than ±20 μm, the non-linearities measured are below ±2% and the frequency response is in the range of a few kilohertz, compatible with the sampling frequency of most electromechanical assembling/control systems. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems.",

keywords = "Amorphous silicon, Large-area devices, Position sensors, Thin films",

author = "Elvira Fortunato and Rodrigo Martins",

year = "1998",

month = jun,

day = "15",

doi = "10.1016/S0924-4247(98)00012-0",

language = "English",

volume = "68",

pages = "244--248",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "1-3",

note = "EUROSENSORS XI Meeting ; Conference date: 21-09-1997 Through 24-09-1997",

}

TY - JOUR

T1 - New materials for large-area position-sensitive detectors

AU - Fortunato, Elvira

AU - Martins, Rodrigo

PY - 1998/6/15

Y1 - 1998/6/15

N2 - Large-area thin-film position-sensitive detectors (TFPSDs) using the hydrogenated amorphous silicon (a-Si:H) technology are presented. The detection accuracy of these devices (lengths of about 80 mm) is better than ±0.5% of the value of the full scale of the sensor, the spatial resolution is better than ±20 μm, the non-linearities measured are below ±2% and the frequency response is in the range of a few kilohertz, compatible with the sampling frequency of most electromechanical assembling/control systems. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems.

AB - Large-area thin-film position-sensitive detectors (TFPSDs) using the hydrogenated amorphous silicon (a-Si:H) technology are presented. The detection accuracy of these devices (lengths of about 80 mm) is better than ±0.5% of the value of the full scale of the sensor, the spatial resolution is better than ±20 μm, the non-linearities measured are below ±2% and the frequency response is in the range of a few kilohertz, compatible with the sampling frequency of most electromechanical assembling/control systems. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems.

KW - Amorphous silicon

KW - Large-area devices

KW - Position sensors

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=0041636203&partnerID=8YFLogxK

U2 - 10.1016/S0924-4247(98)00012-0

DO - 10.1016/S0924-4247(98)00012-0

M3 - Conference article

AN - SCOPUS:0041636203

SN - 0924-4247

VL - 68

SP - 244

EP - 248

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-3

T2 - EUROSENSORS XI Meeting

Y2 - 21 September 1997 through 24 September 1997

ER -

New materials for large-area position-sensitive detectors

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Keywords

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