TY - JOUR
T1 - Multitechnique surface analysis system: apparatus description
AU - Teodoro, O. M. N. D.
AU - Silva, J. A. M. C.
AU - Moutinho, A. M. C.
N1 - This work has been supported by Junta National de Investigacao Cientifica (JNICT) through the projects PMCT 87 468 FIS, STRADjCjCEM 555/92a nd also by the HCM network CHRX-CT-93-0104.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - A new multitechnique surface analysis system is presented. It has been designed for research on ion-solid interactions and for survey analysis. SIMS, XPS and AES are the main techniques used. Primary sources are an argon source for standard SIMS and a cesium source for negative and cathionized SIMS, a twin anode (Mg and Al) X-ray source for XPS, and a small spot electron gun for AES and low resolution electron microscopy. The mass spectrometer is a modified quadrupole based probe with an energy analyzer. Dynamic and static SIMS are possible as well as depth profiling. Photoelectrons and Auger electrons are analyzed by a true hemispherical energy analyzer that can also be used for ion spectroscopy. A secondary electron detector is also available. Exchanging the samples is possible through a fast entry air lock. In this small chamber a sputter gun is used to clean the sample. The sample under analysis is supported by a XYZ manipulator and can be temperature controlled in the range 130-850 K.
AB - A new multitechnique surface analysis system is presented. It has been designed for research on ion-solid interactions and for survey analysis. SIMS, XPS and AES are the main techniques used. Primary sources are an argon source for standard SIMS and a cesium source for negative and cathionized SIMS, a twin anode (Mg and Al) X-ray source for XPS, and a small spot electron gun for AES and low resolution electron microscopy. The mass spectrometer is a modified quadrupole based probe with an energy analyzer. Dynamic and static SIMS are possible as well as depth profiling. Photoelectrons and Auger electrons are analyzed by a true hemispherical energy analyzer that can also be used for ion spectroscopy. A secondary electron detector is also available. Exchanging the samples is possible through a fast entry air lock. In this small chamber a sputter gun is used to clean the sample. The sample under analysis is supported by a XYZ manipulator and can be temperature controlled in the range 130-850 K.
UR - http://www.scopus.com/inward/record.url?scp=0029360306&partnerID=8YFLogxK
U2 - 10.1016/0042-207X(95)00142-5
DO - 10.1016/0042-207X(95)00142-5
M3 - Conference article
AN - SCOPUS:0029360306
SN - 0042-207X
VL - 46
SP - 1205
EP - 1209
JO - Vacuum
JF - Vacuum
IS - 8-10
T2 - 4th European Vacuum Conference (EVC-4)/1st Swedish Vacuum Meeting (SVM-1)
Y2 - 13 June 1994 through 17 June 1994
ER -