Round-robin characterization is reported on the sputter depth profiling of CrN/AlN multilayer thin-film coatings on nickel alloy by secondary ion mass spectrometry (SIMS) and glow-discharge optical emission spectrometry (GD-OES). It is demonstrated that a CAMECA SIMS 4550 Depth Profiler operated with 3 keV O (2) (+) primary ions provides the best depth resolution and sensitivity. The key factor is sample rotation, which suppresses the negative influence of the surface topography (initial and ion-induced) on the depth profile characteristics.
Tolstoguzov, A. (2010). Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry. Journal Of Analytical Chemistry, 65(13), 1370-1376. https://doi.org/10.1134/S1061934810130101