Multifunctional Thin Film Zinc Oxide Semiconductors: Application to Electronic Devices

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In this paper we report some of the recent advances in transparent thin film oxide semiconductors, specifically zinc oxide (ZnO), produced by rf magnetron sputtering at room temperature with multifunctional properties. By controlling the deposition parameters it is possible to produce undoped material with electronic semiconductor properties or by doping it to get either n-type or p-type semiconductor behavior. In this work we refer our experience in producing n-type doping ZnO as transparent electrode to be used in optoelectronic applications such as solar cells and position sensitive detectors while the undoped ZnO can be used as UV photodetector or ozone gas sensor or even as active layer of fully transparent thin film transistors.
Original languageEnglish
Pages (from-to)3-7
Number of pages5
JournalMaterials Science Forum
Publication statusPublished - 2006


  • ZnO thin films;
  • ransparent conductive oxides
  • UV/ ozone sensors
  • f magnetron sputtering.


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