Abstract
A multicapillary swivel-type McLeod of easy transport and operation, which is able to measure pressures from 103 down to 10-3 Pa, was designed, built and finally tested in a high vacuum calibration system against a typical McLeod gauge.
Original language | English |
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Pages (from-to) | 809-810 |
Number of pages | 2 |
Journal | Vacuum |
Volume | 39 |
Issue number | 7-8 |
DOIs | |
Publication status | Published - 1989 |