TY - JOUR
T1 - Millimeter-sized few-layer suspended graphene membranes
AU - Carvalho, Alexandre F.
AU - Fernandes, António J. S.
AU - Ben Hassine, Mohamed
AU - Ferreira, Paulo
AU - Fortunato, Elvira
AU - Costa, Florinda M.
N1 - projects Ultragraf-M-ERA-NET2/0003/2016, i3N, UIDB/50 025/2020 and UIDP/50025/2020, financed by national funds through the FCT/MEC.
This work was supported by FCT, through IDMEC, under LAETA, project UIDB/50022/2020.
A. F. Carvalho acknowledges the PhD grant DAEPHYS-FCT PD/BD/114063/2015, and the funding from "Programa de Estimulo aInvestigacao 2016" from Fundacao Calouste Gulbenkian.
PY - 2020/12
Y1 - 2020/12
N2 - In this work, suspended 4-mm-wide graphene membranes are obtained through a sublimation-assisted transfer process, using few-layer films grown by microwave plasma chemical vapor deposition. This result is achieved by a new approach involving the removal of the graphene-transfer supporting layer in vacuum. The membranes produced by this procedure show the largest area-to-thickness ratio described in the literature with a 2-fold improvement when compared to the best results using the conventional PMMA-assisted transfer, and a five orders of magnitude increase when compared to previous sublimation-assisted processes. This breakthrough allows the implementation of a wide variety of technological applications where 2D materials with atomic thickness and large areas are required. As large-area free-standing membranes are difficult to obtain, a new figure of merit is defined to benchmark the various methods of suspending graphene. A high transfer yield is achieved, and the mechanical and optical properties of the 3.7 nm thick membranes are evaluated. Finally, a prototype condenser microphone is built and tested, and found to exhibit an enhanced specific response.
AB - In this work, suspended 4-mm-wide graphene membranes are obtained through a sublimation-assisted transfer process, using few-layer films grown by microwave plasma chemical vapor deposition. This result is achieved by a new approach involving the removal of the graphene-transfer supporting layer in vacuum. The membranes produced by this procedure show the largest area-to-thickness ratio described in the literature with a 2-fold improvement when compared to the best results using the conventional PMMA-assisted transfer, and a five orders of magnitude increase when compared to previous sublimation-assisted processes. This breakthrough allows the implementation of a wide variety of technological applications where 2D materials with atomic thickness and large areas are required. As large-area free-standing membranes are difficult to obtain, a new figure of merit is defined to benchmark the various methods of suspending graphene. A high transfer yield is achieved, and the mechanical and optical properties of the 3.7 nm thick membranes are evaluated. Finally, a prototype condenser microphone is built and tested, and found to exhibit an enhanced specific response.
KW - Anthracene
KW - CVD graphene
KW - Microphone
KW - Sublimation
KW - Transfer
UR - http://www.scopus.com/inward/record.url?scp=85096984642&partnerID=8YFLogxK
U2 - 10.1016/j.apmt.2020.100879
DO - 10.1016/j.apmt.2020.100879
M3 - Article
AN - SCOPUS:85096984642
SN - 2352-9407
VL - 21
JO - Applied Materials Today
JF - Applied Materials Today
M1 - 100879
ER -