Original language | Unknown |
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Pages (from-to) | 60-65 |
Journal | Applied Surface Science |
Volume | 184 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 1 Jan 2001 |
Mass spectroscopy analysis during the deposition of a-SiC : H and a-C : H films produced by hot wire and hot wire plasma-assisted techniques
DCM Group Author, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins, Isabel Maria Mercês Ferreira, Hugo Manuel Brito Águas
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)