Mass spectroscopy analysis during the deposition of a-SiC : H and a-C : H films produced by hot wire and hot wire plasma-assisted techniques

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageUnknown
Pages (from-to)60-65
JournalApplied Surface Science
Volume184
Issue number1-4
DOIs
Publication statusPublished - 1 Jan 2001

Cite this