Low temperature processed hafnium oxide: Structural and electrical properties

Luis Miguel Nunes Pereira; Pedro Miguel Cândido Barquinha; Elvira Maria Correia Fortunato; Rodrigo Ferrão de Paiva Martins

doi:10.1016/j.mssp.2006.10.031

Low temperature processed hafnium oxide: Structural and electrical properties

Luis Miguel Nunes Pereira, Pedro Miguel Cândido Barquinha, Elvira Maria Correia Fortunato, Rodrigo Ferrão de Paiva Martins

DCM - Departamento de Ciência dos Materiais

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Original language	English
Pages (from-to)	1125-1132
Number of pages	8
Journal	Materials Science in Semiconductor Processing
Volume	9
Issue number	6
DOIs	https://doi.org/10.1016/j.mssp.2006.10.031
Publication status	Published - Dec 2006

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10.1016/j.mssp.2006.10.031

Cite this

@article{30344c470058474d9b71bba411e2571a,

title = "Low temperature processed hafnium oxide: Structural and electrical properties",

author = "Pereira, {Luis Miguel Nunes} and Barquinha, {Pedro Miguel C{\^a}ndido} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2006",

month = dec,

doi = "10.1016/j.mssp.2006.10.031",

language = "English",

volume = "9",

pages = "1125--1132",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier Science B.V., Amsterdam.",

number = "6",

}

TY - JOUR

T1 - Low temperature processed hafnium oxide: Structural and electrical properties

AU - Pereira, Luis Miguel Nunes

AU - Barquinha, Pedro Miguel Cândido

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2006/12

Y1 - 2006/12

U2 - 10.1016/j.mssp.2006.10.031

DO - 10.1016/j.mssp.2006.10.031

M3 - Article

SN - 1369-8001

VL - 9

SP - 1125

EP - 1132

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

IS - 6

ER -