Low Temperature Deposition of Conducting Indium Oxide Films for Solar Cell Applications

G. Lavareda Lavareda, Yuri Vygranenko, Miguel Fernandes, Maria Manuela de Almeida Carvalho Vieira, N. Carvalho, Pedro Brogueira, A. Amaral

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


In this contribution, we report on low temperature deposition of conducting indium oxide (In2O3 ) films by a radio-frequency plasma enhanced reactive thermal evaporation technique. The films were deposited on glass and flexible polyethylene terephthalate substrates without intentional heating of the substrate and at temperatures up to 150 oC. The material stoichiometry was accurately controlled by adjusting the deposition conditions including oxygen flow, process pressure, pumping speed, and rf-power. The Hall effect measurements were performed on the fabricated samples to determine the relation between the deposition conditions and the electrical properties of the films. The resistivity of 4×10 -4 Ω-cm was reached under optimized deposition conditions. Coatings on flexible plastic substrates with 16 Ω/sq sheet resistance show an 82% peak value of transmittance in the visible spectral range. The film morphology is also analyzed by scanning electron microscopy (SEM).
Original languageEnglish
Title of host publicationProceedings of the 34th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC)
Number of pages3
Publication statusPublished - 2 Nov 2017


  • ITO
  • Electrical Properties
  • Flexible Substrate
  • Optical Properties
  • Antireflection Coating


Dive into the research topics of 'Low Temperature Deposition of Conducting Indium Oxide Films for Solar Cell Applications'. Together they form a unique fingerprint.

Cite this